ACLS SEC-Einreichungen - Axcelis Technologies, Inc.- Jahresbericht, Proxy Statement, Prospekt

Basisstatistiken

LEI	529900HF9B6NL1QG9F05
CIK	1113232

SEC Filings

All companies that sell securities in the United States must register with the Securities and Exchange Commission (SEC) and file reports on a regular basis. These reports include company annual reports (10K, 10Q), news updates (8K), investor presentations (found in 8Ks), insider trades (form 4), ownership reports (13D, and 13G), and reports related to the specific securities sold, such as registration statements and prospectus. This page shows recent SEC filings related to Axcelis Technologies, Inc.

SEC Filings (Chronological Order)

Auf dieser Seite finden Sie eine vollständige, chronologische Liste der SEC-Einreichungen, mit Ausnahme der Eigentumseinreichungen, die wir an anderer Stelle bereitstellen.

May 27, 2026	EX-1.01	Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2025 Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2025 This conflict minerals report is an exhibit to the Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 33 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 13% of a
May 27, 2026	SD	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) OMB APPROVAL OMB Number: 3235-0697 Expires: August 31, 2027 Estimated average burden hours per response.
May 8, 2026	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2026 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00
May 7, 2026	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 7, 2026 Axcelis Technologies, UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 7, 2026 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
May 7, 2026	EX-99.1	Axcelis Announces Financial Results for First Quarter 2026 Exhibit 99.1 News Release Axcelis Announces Financial Results for First Quarter 2026 Q1 2026 Highlights: · Revenue of $199.0 million · GAAP Gross Margin of 40.5%, and Non-GAAP Gross Margin of 40.7% · GAAP Operating Margin of 4.0% and Non-GAAP Operating Margin of 11.7% · GAAP Diluted Earnings Per Share of $0.30, and Non-GAAP Diluted Earnings Per Share of $0.72 BEVERLY, Mass., May 7, 2026—Axcelis Te
May 6, 2026	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 5, 2026 Axcelis Technologies, UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 5, 2026 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
April 29, 2026	425	NewCo Update By Axcelis Communications ● Apr 29, 2026 Smart Brevity® count: 5.5 mins...1447 words Filed by Axcelis Technologies, Inc. Pursuant to Rule 425 under the Securities Act of 1933, as amended, and deemed filed pursuant to Rule 14a-12 under the Securities Exchange Act of 1934, as amended Subject Company: Vecco Instruments Inc. Commission File No.: 0-16244 The following was sent to employees of Axcelis Technologies, Inc. on April 29, 2026: Here is an update on the Axcelis+Veeco merger ac
April 29, 2026	425	NewCo Update By Axcelis Communications ● Apr 29, 2026 Smart Brevity® count: 5.5 mins...1447 words Filed by Axcelis Technologies, Inc. Pursuant to Rule 425 under the Securities Act of 1933, as amended, and deemed filed pursuant to Rule 14a-12 under the Securities Exchange Act of 1934, as amended Subject Company: Vecco Instruments Inc. Commission File No.: 0-16244 The following was sent to employees of Axcelis Technologies, Inc. on April 29, 2026: Here is an update on the Axcelis+Veeco merger ac
March 31, 2026	DEF 14A	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule
March 31, 2026	ARS	ARS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2025 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI
March 12, 2026	EX-99.1	Axcelis Announces CFO Transition David Ryzhik Appointed Interim Chief Financial Officer Exhibit 99.1 News Release Axcelis Announces CFO Transition David Ryzhik Appointed Interim Chief Financial Officer BEVERLY, Mass., March 12, 2026 – Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced that David Ryzhik, Senior Vice President of Investor Relations and Corporate Strategy, has been appointed Interim Chief Financial Officer, effective March 12. James Coogan is leaving the Company
March 12, 2026	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 10, 2026 Axcelis Technologi UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 10, 2026 Axcelis Technologies, Inc. (Exact Name of Registrant as Specified in Charter) Delaware 000-30941 34-1818596 (State or Other Jurisdiction of Incorporation) (Commission F
February 26, 2026	10-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2025 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941
February 26, 2026	EX-21.1	Axcelis Technologies, Inc. Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2025 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1.Axcelis Technologies (Israel) Inc., a Delaware corporation 2.Victory Merger Sub, Inc., a Delaware corporation European Subsidiarie
February 26, 2026	EX-14.1	Ethical Business Conduct at Axcelis ‌Exhibit 14.1 Ethical Business Conduct at Axcelis OUR EXPECTATIONS This policy is a formal statement of the expectations of Axcelis management and its Board of Directors that all employees, officers and members of our Board of Directors will in the day-to-day conduct of Axcelis’ business act in an ethical manner and in full compliance with applicable law. We expect our employees, officers and memb
February 26, 2026	EX-10.7	Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 14, 2026 Exhibit 10.7 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 14, 2026 This Exhibit discloses the current agreements with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of: · the Company’s principal executive officer (Russell J. Low), · the Company’s principal financial officer (James G. Coogan), and ● the three most highly
February 26, 2026	EX-10.8	Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 14, 2026 Exhibit 10.8 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 14, 2026 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: Role Annual Retainers in Effect as of July 1, 202
February 26, 2026	EX-10.1	AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of ‌Exhibit 10.1 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockholders on May 16, 2017; as amended by the Board
February 17, 2026	EX-99.1	Axcelis Announces Financial Results for Fourth Quarter and Full Year 2025 Exhibit 99.1 News Release Axcelis Announces Financial Results for Fourth Quarter and Full Year 2025 Q4 Highlights: · Revenue of $238 million · GAAP Gross Margin of 47.0%, and Non-GAAP Gross Margin of 47.3% · GAAP Operating Margin of 15.2% and Non-GAAP Operating Margin of 21.1% · GAAP Diluted Earnings Per Share of $1.10, and Non-GAAP Diluted Earnings Per Share of $1.49 BEVERLY, Mass., February 17,
February 17, 2026	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 17, 2026 Axcelis Technol UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 17, 2026 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe
February 12, 2026	425	NewCo Update By Axcelis Communications ● Feb 12, 2026 Smart Brevity® count: 6.5 mins...1697 words Filed by Axcelis Technologies, Inc. Pursuant to Rule 425 under the Securities Act of 1933, as amended, and deemed filed pursuant to Rule 14a-12 under the Securities Exchange Act of 1934, as amended Subject Company: Vecco Instruments Inc. Commission File No.: 0-16244 The following e-mail was sent to employees of Axcelis Technologies, Inc. on February 12, 2026: NewCo Update By Axcelis Communications
February 12, 2026	425	NewCo Update By Axcelis Communications ● Feb 12, 2026 Smart Brevity® count: 6.5 mins...1697 words Filed by Axcelis Technologies, Inc. Pursuant to Rule 425 under the Securities Act of 1933, as amended, and deemed filed pursuant to Rule 14a-12 under the Securities Exchange Act of 1934, as amended Subject Company: Vecco Instruments Inc. Commission File No.: 0-16244 The following e-mail was sent to employees of Axcelis Technologies, Inc. on February 12, 2026: NewCo Update By Axcelis Communications
February 6, 2026	EX-99.1	Axcelis Stockholders Approve Merger with Veeco Exhibit 99.1 Axcelis Stockholders Approve Merger with Veeco BEVERLY, Mass., Feb. 6, 2026 – Axcelis Technologies, Inc. (Nasdaq: ACLS) (“Axcelis”) today announced that its stockholders have voted to approve all proposals related to the Company’s pending merger (the “Merger”) with Veeco Instruments Inc. (Nasdaq: VECO) at its Special Meeting of Stockholders (“Special Meeting”). The final voting result
February 6, 2026	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 6, 2026 Axcelis Technolo UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 6, 2026 Axcelis Technologies, Inc. (Exact Name of Registrant as Specified in Charter) Delaware 000-30941 34-1818596 (State or Other Jurisdiction (Commission (IRS Employer of
February 6, 2026	425	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 6, 2026 Axcelis Technolo UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 6, 2026 Axcelis Technologies, Inc. (Exact Name of Registrant as Specified in Charter) Delaware 000-30941 34-1818596 (State or Other Jurisdiction (Commission (IRS Employer of
February 2, 2026	425	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 22, 2026 Axcelis Technolo UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 22, 2026 Axcelis Technologies, Inc. (Exact Name of Registrant as Specified in Charter) Delaware 000-30941 34-1818596 (State or Other Jurisdiction (Commission (IRS Employer of
February 2, 2026	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 22, 2026 Axcelis Technolo UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 22, 2026 Axcelis Technologies, Inc. (Exact Name of Registrant as Specified in Charter) Delaware 000-30941 34-1818596 (State or Other Jurisdiction (Commission (IRS Employer of
January 28, 2026	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 28, 2026 Axcelis Technolo UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 28, 2026 Axcelis Technologies, Inc. (Exact Name of Registrant as Specified in Charter) Delaware 000-30941 34-1818596 (State or Other Jurisdiction (Commission (IRS Employer of
January 28, 2026	425	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 28, 2026 Axcelis Technolo UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 28, 2026 Axcelis Technologies, Inc. (Exact Name of Registrant as Specified in Charter) Delaware 000-30941 34-1818596 (State or Other Jurisdiction (Commission (IRS Employer of
December 31, 2025	424B3	MERGER & SHARE ISSUANCE PROPOSALS — YOUR VOTE IS VERY IMPORTANT TABLE OF CONTENTS Filed Pursuant to Rule 424(b)(3) Registration No. 333-292008 MERGER & SHARE ISSUANCE PROPOSALS — YOUR VOTE IS VERY IMPORTANT Dear Stockholders: On September 30, 2025, Axcelis Technologies, Inc., which is referred to as Axcelis, Veeco Instruments Inc., which is referred to as Veeco, and Victory Merger Sub, Inc., a wholly owned subsidiary of Axcelis, which is referred to as Merg
December 29, 2025	EX-99.3	Consent to Reference in Registration Statement Exhibit 99.3 Consent to Reference in Registration Statement In connection with the filing by Axcelis Technologies Inc. (“Axcelis”) of the Registration Statement on Form S-4 (the “Registration Statement”) with the U.S. Securities and Exchange Commission under the Securities Act of 1933, as amended (the “Securities Act”), I hereby consent, pursuant to Rule 438 of the Securities Act, to the reference
December 29, 2025	EX-99.1	CONSENT OF UBS SECURITIES LLC Exhibit 99.1 CONSENT OF UBS SECURITIES LLC We hereby consent to the use of our opinion letter dated September 30, 2025 to the Board of Directors of Veeco Instruments Inc. (the “Company“) included as Annex C to the Joint Proxy Statement/Prospectus which forms a part of the Registration Statement on Form S-4, as amended, relating to the proposed merger of Axcelis Technologies, Inc. and the Company a
December 29, 2025	EX-99.5	Consent to Reference in Registration Statement Exhibit 99.5 Consent to Reference in Registration Statement In connection with the filing by Axcelis Technologies Inc. (“Axcelis”) of the Registration Statement on Form S-4 (the “Registration Statement”) with the U.S. Securities and Exchange Commission under the Securities Act of 1933, as amended (the “Securities Act”), I hereby consent, pursuant to Rule 438 of the Securities Act, to the reference
December 29, 2025	EX-99.6	Consent to Reference in Registration Statement Exhibit 99.6 Consent to Reference in Registration Statement In connection with the filing by Axcelis Technologies Inc. (“Axcelis”) of the Registration Statement on Form S-4 (the “Registration Statement”) with the U.S. Securities and Exchange Commission under the Securities Act of 1933, as amended (the “Securities Act”), I hereby consent, pursuant to Rule 438 of the Securities Act, to the reference
December 29, 2025	S-4/A	As filed with the U.S. Securities and Exchange Commission on December 29, 2025 TABLE OF CONTENTS As filed with the U.S. Securities and Exchange Commission on December 29, 2025 Registration No. 333-292008 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 AMENDMENT NO. 1 TO FORM S-4 REGISTRATION STATEMENT UNDER THE SECURITIES ACT OF 1933 AXCELIS TECHNOLOGIES, INC. (Exact Name of Registrant as Specified in Its Charter) Delaware (State of Incorporation) 355
December 29, 2025	EX-99.7	Important Notice Regarding the Availability of Proxy Materials for the Special Meeting: The Notice and Proxy Statement is available at www.proxyvote.com. V82569-S29749 Continued, and must be signed and dated on the other side VEECO INSTRUMENTS INC. S Exhibit 99.7 Signature [PLEASE SIGN WITHIN BOX] Date Signature (Joint Owners) Date TO VOTE, MARK BLOCKS BELOW IN BLUE OR BLACK INK AS FOLLOWS: KEEP THIS PORTION FOR YOUR RECORDS DETACH AND RETURN THIS PORTION ONLY THIS PROXY CARD IS VALID ONLY WHEN SIGNED AND DATED. V82568-S29749 For Against Abstain ! ! ! ! ! ! ! ! ! VEECO INSTRUMENTS INC. TERMINAL DRIVE PLAINVIEW, NEW YORK 11803 VEECO INSTRUMENTS
December 29, 2025	EX-99.8	Small steps make an impact. Help the environment by consenting to receive electronic delivery, sign up at www.investorvote.com/acls Notice of 2026 Special Meeting of Stockholders To be held at the offices of Axcelis Technologies, Inc. Beverly, Massac Exhibit 99.8 1UPX A Proposals — The Board of Directors recommend a vote FOR Proposals 1 and 2. 04842A 1. To approve the issuance of shares of Axcelis Technologies, Inc. (“Axcelis”) common stock (the “Axcelis Share Issuance Proposal”) pursuant to the Agreement and Plan of Merger, dated as of September 30, 2025, by and among Axcelis, Victory Merger Sub, Inc., a wholly owned subsidiary of Axcelis, an
December 29, 2025	EX-99.4	Consent to Reference in Registration Statement Exhibit 99.4 Consent to Reference in Registration Statement In connection with the filing by Axcelis Technologies Inc. (“Axcelis”) of the Registration Statement on Form S-4 (the “Registration Statement”) with the U.S. Securities and Exchange Commission under the Securities Act of 1933, as amended (the “Securities Act”), I hereby consent, pursuant to Rule 438 of the Securities Act, to the reference
December 8, 2025	S-4	As filed with the U.S. Securities and Exchange Commission on December 8, 2025 TABLE OF CONTENTS As filed with the U.S. Securities and Exchange Commission on December 8, 2025 Registration No. 333- UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM S-4 REGISTRATION STATEMENT UNDER THE SECURITIES ACT OF 1933 AXCELIS TECHNOLOGIES, INC. (Exact Name of Registrant as Specified in Its Charter) Delaware (State of Incorporation) 3559 (Primary Standard
December 8, 2025	EX-FILING FEES	Security Type Calculation of Filing Fee Tables S-4 AXCELIS TECHNOLOGIES INC Table 1: Newly Registered and Carry Forward Securities ☐Not Applicable Security Type Security Class Title Fee Calculation or Carry Forward Rule Amount Registered Proposed Maximum Offering Price Per Unit Maximum Aggregate Offering Price Fee Rate Amount of Registration Fee Carry Forward Form Type Carry Forward File Number Carry Forward Initial Effective Date Filing Fee Previously Paid in Connection with Unsold Securities to be Carried Forward Newly Registered Securities Fees to be Paid 1 Equity Common Stock, $0.
December 8, 2025	EX-99.2	CONSENT OF J.P. MORGAN SECURITIES LLC Exhibit 99.2 CONSENT OF J.P. MORGAN SECURITIES LLC We hereby consent to (i) the inclusion of our opinion letter, dated September 30, 2025, to the Board of Directors of Axcelis Technologies, Inc. (“Axcelis”) as Annex B to the joint proxy statement/prospectus that forms a part of the Registration Statement on Form S-4 (the “Registration Statement”) relating to the proposed transaction involving Axce
December 8, 2025	EX-99.1	CONSENT OF UBS SECURITIES LLC Exhibit 99.1 CONSENT OF UBS SECURITIES LLC We hereby consent to the use of our opinion letter dated September 30, 2025 to the Board of Directors of Veeco Instruments Inc. (the “Company“) included as Annex C to the Joint Proxy Statement/Prospectus which forms a part of the Registration Statement on Form S-4 relating to the proposed merger of Axcelis Technologies, Inc. and the Company and references
November 6, 2025	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2025 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe
November 4, 2025	EX-99.1	Axcelis Announces Financial Results for Third Quarter 2025 Exhibit 99.1 News Release Axcelis Announces Financial Results for Third Quarter 2025 Q3 Highlights: • Revenue of $213.6 million • GAAP Gross Margin of 41.6%, and Non-GAAP Gross Margin of 41.8% • GAAP Operating Margin of 11.7% and Non-GAAP Operating Margin of 18.2% • GAAP Diluted earnings per share of $0.83, and Non-GAAP Diluted earnings per share of $1.21 BEVERLY, Mass.— November 4, 2025—Axcelis T
November 4, 2025	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 4, 2025 Axcelis Technolo UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 4, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
October 1, 2025	EX-99.2	1 By Revenue 2 Cash includes cash, cash equivalents, short-term investments and long-term investments as of June 30, 2025, as reflected in the respective balance sheets of both companies 3 Based on FY 2024 actual figures 4 Represents non-GAAP figures Exhibit 99.2 Combining to Create a Leading Semiconductor Equipment Company Diversifies Portfolio with Complementary Capital Equipment Solutions and Expands Addressable Markets Supported by Secular Tailwinds Combining Capabilities to Create a Compelling Investment Opportunity Transaction expected to be accretive to non-GAAP EPS within the first year post-closing Estimated pro forma cash, cash equiv
October 1, 2025	EX-2.1	AGREEMENT AND PLAN OF MERGER AXCELIS TECHNOLOGIES, INC., VICTORY MERGER SUB, INC., VEECO INSTRUMENTS INC. Dated as of September 30, 2025 TABLE OF CONTENTS Exhibit 2.1 Execution Version AGREEMENT AND PLAN OF MERGER among AXCELIS TECHNOLOGIES, INC., VICTORY MERGER SUB, INC., and VEECO INSTRUMENTS INC. Dated as of September 30, 2025 TABLE OF CONTENTS Page ARTICLE 1 The Merger 1.1 The Merger 2 1.2 Closing 2 1.3 Effective Time 2 1.4 Surviving Corporation Certificate of Incorporation and Bylaws 3 1.5 Directors and Officers of the Surviving Corporation 3 1
October 1, 2025	EX-99.1	Axcelis Technologies and Veeco Instruments to Combine, Creating a Leading Semiconductor Equipment Company Diversifies Portfolio with Complementary Capital Equipment Solutions and Expands Addressable Markets Supported by Secular Tailwinds Greater R&D Exhibit 99.1 Axcelis Technologies and Veeco Instruments to Combine, Creating a Leading Semiconductor Equipment Company Diversifies Portfolio with Complementary Capital Equipment Solutions and Expands Addressable Markets Supported by Secular Tailwinds Greater R&D Scale to Fuel Differentiated, Next-Generation Technologies for Customers Resilient Pro-Forma Operating Profile and Balance Sheet to Suppo
October 1, 2025	EX-99.1	Combining to Create an Industry Leading Semiconductor Equipment Company Oct 1, 2025 Exhibit 99.1 Combining to Create an Industry Leading Semiconductor Equipment Company Oct 1, 2025 2 Disclaimer This presentation is for informational purposes only and may not be used for any other purposes. This Presentation shall not con stitute an offer to sell, or the solicitation of an offer to buy, any securities, nor shall there be any sale of securities in any state s o r jurisdictions in w
October 1, 2025	EX-99.6	EXHIBIT 99.6 Exhibit 99.6
October 1, 2025	EX-99.4	ACLS-VECO Employee Letter Exhibit 99.4 ACLS-VECO Employee Letter To: All Axcelis Employees From: Dr. Russell Low Subject: Axcelis and Veeco to Combine: Creating a Leading Semiconductor Equipment Company Axcelis Team – For more than 45 years, Axcelis has provided innovative, high-productivity solutions for the semiconductor industry. Today marks a transformative milestone to position our company for even greater long-term s
October 1, 2025	EX-99.4	ACLS-VECO Employee Letter Exhibit 99.4 ACLS-VECO Employee Letter To: All Axcelis Employees From: Dr. Russell Low Subject: Axcelis and Veeco to Combine: Creating a Leading Semiconductor Equipment Company Axcelis Team – For more than 45 years, Axcelis has provided innovative, high-productivity solutions for the semiconductor industry. Today marks a transformative milestone to position our company for even greater long-term s
October 1, 2025	425	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 1, 2025 Axcelis Technolog UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 1, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
October 1, 2025	EX-99.5	Axcelis Technologies and Veeco Instruments-Merger Call Exhibit 99.5 FINAL TRANSCRIPT 2025-10-01 Axcelis Technologies Inc (ACLS US Equity) Axcelis Technologies and Veeco Instruments-Merger Call Company Participants · David Ryzhik, Senior Vice President, Investor Relations and Corporate Strategy · James Coogan, Executive Vice President and Chief Financial Oﬃcer · John P. Kiernan, Senior Vice President and Chief Financial Oﬃcer · Russell Low, President a
October 1, 2025	EX-99.2	1 By Revenue 2 Cash includes cash, cash equivalents, short-term investments and long-term investments as of June 30, 2025, as reflected in the respective balance sheets of both companies 3 Based on FY 2024 actual figures 4 Represents non-GAAP figures Exhibit 99.2 Combining to Create a Leading Semiconductor Equipment Company Diversifies Portfolio with Complementary Capital Equipment Solutions and Expands Addressable Markets Supported by Secular Tailwinds Combining Capabilities to Create a Compelling Investment Opportunity Transaction expected to be accretive to non-GAAP EPS within the first year post-closing Estimated pro forma cash, cash equiv
October 1, 2025	EX-99.1	Combining to Create an Industry Leading Semiconductor Equipment Company Oct 1, 2025 Exhibit 99.1 Combining to Create an Industry Leading Semiconductor Equipment Company Oct 1, 2025 2 Disclaimer This presentation is for informational purposes only and may not be used for any other purposes. This Presentation shall not con stitute an offer to sell, or the solicitation of an offer to buy, any securities, nor shall there be any sale of securities in any state s o r jurisdictions in w
October 1, 2025	EX-99.6	EXHIBIT 99.6 Exhibit 99.6
October 1, 2025	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 1, 2025 Axcelis Technolog UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): October 1, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
October 1, 2025	EX-99.3	Exhibit 99.3 Exhibit 99.3
October 1, 2025	425	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, DC 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): October 1, 2025 Axcelis Technologie UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, DC 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): October 1, 2025 Axcelis Technologies, Inc.
October 1, 2025	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, DC 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): October 1, 2025 Axcelis Technologie UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, DC 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of report (Date of earliest event reported): October 1, 2025 Axcelis Technologies, Inc.
October 1, 2025	EX-2.1	AGREEMENT AND PLAN OF MERGER AXCELIS TECHNOLOGIES, INC., VICTORY MERGER SUB, INC., VEECO INSTRUMENTS INC. Dated as of September 30, 2025 TABLE OF CONTENTS Exhibit 2.1 Execution Version AGREEMENT AND PLAN OF MERGER among AXCELIS TECHNOLOGIES, INC., VICTORY MERGER SUB, INC., and VEECO INSTRUMENTS INC. Dated as of September 30, 2025 TABLE OF CONTENTS Page ARTICLE 1 The Merger 1.1 The Merger 2 1.2 Closing 2 1.3 Effective Time 2 1.4 Surviving Corporation Certificate of Incorporation and Bylaws 3 1.5 Directors and Officers of the Surviving Corporation 3 1
October 1, 2025	EX-99.3	Exhibit 99.3 Exhibit 99.3
October 1, 2025	EX-99.1	Axcelis Technologies and Veeco Instruments to Combine, Creating a Leading Semiconductor Equipment Company Diversifies Portfolio with Complementary Capital Equipment Solutions and Expands Addressable Markets Supported by Secular Tailwinds Greater R&D Exhibit 99.1 Axcelis Technologies and Veeco Instruments to Combine, Creating a Leading Semiconductor Equipment Company Diversifies Portfolio with Complementary Capital Equipment Solutions and Expands Addressable Markets Supported by Secular Tailwinds Greater R&D Scale to Fuel Differentiated, Next-Generation Technologies for Customers Resilient Pro-Forma Operating Profile and Balance Sheet to Suppo
October 1, 2025	EX-99.5	Axcelis Technologies and Veeco Instruments-Merger Call Exhibit 99.5 FINAL TRANSCRIPT 2025-10-01 Axcelis Technologies Inc (ACLS US Equity) Axcelis Technologies and Veeco Instruments-Merger Call Company Participants · David Ryzhik, Senior Vice President, Investor Relations and Corporate Strategy · James Coogan, Executive Vice President and Chief Financial Oﬃcer · John P. Kiernan, Senior Vice President and Chief Financial Oﬃcer · Russell Low, President a
August 5, 2025	EX-99.1	Axcelis Announces Financial Results for Second Quarter 2025 Exhibit 99.1 News Release Axcelis Announces Financial Results for Second Quarter 2025 Q2 Highlights: · Revenue of $194.5 million · GAAP Gross Margin of 44.9%, and Non-GAAP Gross Margin of 45.2% · GAAP Operating Margin of 14.9% and Non-GAAP Operating Margin of 17.7% · GAAP Diluted earnings per share of $0.98, and Non-GAAP Diluted earnings per share of $1.13 BEVERLY, Mass.— August 5, 2025—Axcelis Te
August 5, 2025	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 5, 2025 Axcelis Technologi UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 5, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o
August 5, 2025	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2025 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000
May 29, 2025	EX-FILING FEES	Filing Fee Table. Filed herewith. Calculation of Filing Fee Tables S-8 AXCELIS TECHNOLOGIES INC Table 1: Newly Registered Securities Security Type Security Class Title Fee Calculation Rule Amount Registered Proposed Maximum Offering Price Per Unit Maximum Aggregate Offering Price Fee Rate Amount of Registration Fee 1 Equity Common Stock, par value $0.
May 29, 2025	S-8	As filed with the Securities and Exchange Commission on May 29, 2025 As filed with the Securities and Exchange Commission on May 29, 2025 REGISTRATION NO.
May 8, 2025	8-K	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events, Submission of Matters to a Vote of Security Holders UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 7, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
May 8, 2025	EX-10.1	Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended through May 7, 2025. Incorporated by reference to Exhibit 10.1 of the Registrant’s Form 8-K filed with the Commission on May 8, 2025. Exhibit 10.1 As approved by the Stockholders on May 7, 2025 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockho
May 6, 2025	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 6, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
May 6, 2025	EX-99.1	Axcelis Announces Financial Results for First Quarter 2025 Exhibit 99.1 News Release Axcelis Announces Financial Results for First Quarter 2025 Q1 Highlights: · Revenue of $192.6 million · GAAP Gross Margin of 46.1%, and Non-GAAP Gross Margin of 46.4% · GAAP Operating Margin of 15.1% and Non-GAAP Operating Margin of 18.3% · GAAP Diluted earnings per share of $0.88, and Non-GAAP Diluted earnings per share of $1.04 BEVERLY, Mass.— May 6, 2025—Axcelis Techno
May 6, 2025	EX-1.01	Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form. Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2024 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 48 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 21%
May 6, 2025	SD	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) OMB APPROVAL OMB Number: 3235-0697 Expires: August 31, 2027 Estimated average burden hours per response.
May 6, 2025	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2025 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00
April 21, 2025	8-K	Regulation FD Disclosure, Financial Statements and Exhibits UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): April 21, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o
April 21, 2025	EX-99.1	HISTORICAL GAAP TO NON-GAAP RECONCILIATION APRIL 21, 2025 2 USE OF NON-GAAP MEASURES This presentation includes financial measures that are not presented in accordance with U.S. generally accepted accounting principles (“Non-GAAP financial measures”) Exhibit 99.1 HISTORICAL GAAP TO NON-GAAP RECONCILIATION APRIL 21, 2025 2 USE OF NON-GAAP MEASURES This presentation includes financial measures that are not presented in accordance with U.S. generally accepted accounting principles (“Non-GAAP financial measures”). These Non-GAAP financial measures include non-GAAP gross profit, non-GAAP gross margin, non-GAAP operating expenses, non-GAAP operating
March 31, 2025	DEF 14A	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule
March 31, 2025	ARS	ARS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2024 ☐ ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNO
March 12, 2025	8-K	Financial Statements and Exhibits, Other Events UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): March 12, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o
March 12, 2025	EX-99.1	Axcelis Announces $100 Million Increase to Share Repurchase Authorization Exhibit 99.1 News Release Axcelis Announces $100 Million Increase to Share Repurchase Authorization BEVERLY, Mass.— Mar. 12, 2025—Axcelis Technologies, Inc. (Nasdaq: ACLS) a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that its Board of Directors has approved an additional $100 million in share repurchase authorization. This approval bring
February 28, 2025	EX-10.8	Named Executive Officer Base Compensation at February 15, 2025. Filed herewith. Exhibit 10.8 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2025 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of: · the Company’s principal executive officer (Russell J. Low), · the Company’s principal financial officer (James G. Coogan), and ● the three most hig
February 28, 2025	EX-10.9	Non-Employee Director Cash Compensation at February 15, 2025. Filed herewith. Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2025 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: Role Annual Retainers in Effect as of July 1, 202
February 28, 2025	10-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2024 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941
February 28, 2025	EX-21.1	Subsidiaries of the Company. Filed herewith. Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2024 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axceli
February 28, 2025	EX-10.1	Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as amended by the Board of Directors on November 13, 2024. Filed herewith ‌Exhibit 10.1 AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockholders on May 16, 2017; as amended by the Board
February 10, 2025	EX-99.1	Axcelis Announces Financial Results for Fourth Quarter and Full Year 2024 Exhibit 99.1 Axcelis Announces Financial Results for Fourth Quarter and Full Year 2024 Q4 Highlights: · Revenue of $252.4 million · Operating Margin of 21.6% · Diluted earnings per share of $1.54 BEVERLY, Mass.— Feb. 10, 2025—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2024. For the full year 2024, the Company
February 10, 2025	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 10, 2025 Axcelis Technol UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 10, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe
January 10, 2025	8-K	Regulation FD Disclosure UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): January 10, 2025 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
November 8, 2024	SC 13G/A	ACLS / Axcelis Technologies, Inc. / BlackRock, Inc. Passive Investment SC 13G/A 1 us0545402085110824.txt us0545402085110824.txt SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No: 16) AXCELIS TECHNOLOGIES INC - (Name of Issuer) Common Stock - (Title of Class of Securities) 054540208 - (CUSIP Number) September 30, 2024 - (Date of Event Which Requires Filing of this Statement) Check the appropr
November 7, 2024	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2024 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe
November 6, 2024	8-K	Regulation FD Disclosure, Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 6, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
November 6, 2024	EX-99.2	HISTORICAL BACKLOG CORRECTION NOVEMBER 6, 2024 Exhibit 99.2 HISTORICAL BACKLOG CORRECTION NOVEMBER 6, 2024 2 CORRECTED HISTORICAL BACKLOG (2019 - Q2 2024) June 30, March 31, As of December 31, 2024 2024 2023 2022 2021 2020 2019 (in millions) $879 $973 $1,061 $1,020 $415 $111 $84 Corrected Backlog $994 $1,121 $1,212 $1,125 $461 $116 $99 Previously Reported Backlog $(115) $(149) $(151) $(105) $(46) $(5) $(15) Variance
November 6, 2024	EX-99.1	Axcelis Announces Financial Results for Third Quarter 2024 Exhibit 99.1 NEWS RELEASE Axcelis Announces Financial Results for Third Quarter 2024 · Revenue of $256.6 million · Operating margin of 18.3% · Diluted earnings per share of $1.49 BEVERLY, Mass. — Nov. 6, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2024. The Company reported third quarter revenue of $256.6 million, compa
October 18, 2024	SC 13G/A	ACLS / Axcelis Technologies, Inc. / BlackRock, Inc. Passive Investment SC 13G/A 1 us0545402085101824.txt us0545402085101824.txt SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No: 16) AXCELIS TECHNOLOGIES INC - (Name of Issuer) Common Stock - (Title of Class of Securities) 054540208 - (CUSIP Number) September 30, 2024 - (Date of Event Which Requires Filing of this Statement) Check the appropr
August 1, 2024	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2024 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000
July 31, 2024	EX-99.1	Axcelis Announces Financial Results for Second Quarter 2024 Exhibit 99.1 News Release Axcelis Announces Financial Results for Second Quarter 2024 · Revenue of $256.5 million · Operating margin of 20.6% · Diluted earnings per share of $1.55 BEVERLY, Mass. — July 31, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter ended June 30, 2024. The Company reported second quarter revenue of $256.5 million, compar
July 31, 2024	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 31, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of
July 9, 2024	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 9, 2024 Axcelis Technologies UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 9, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of
July 9, 2024	EX-99.1	Axcelis Announces Preliminary Financial Results for Second Quarter 2024 Ahead of Investor Event Exhibit 99.1 News Release Axcelis Announces Preliminary Financial Results for Second Quarter 2024 Ahead of Investor Event BEVERLY, Mass., July 9, 2024 - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced preliminary financial results for the second quarter of 2024. The Company now expects revenue to b
May 17, 2024	SD	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) OMB APPROVAL OMB Number: 3235-0697 Expires: July 31, 2024 Estimated average burden hours per response.
May 17, 2024	EX-1.01	Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form. Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2023 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 86 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 27%
May 9, 2024	EX-3.1	Certificate of Amendment to the Restated Certificate of Incorporation of the Company filed May 9, 2024. Incorporated by reference to Exhibit 3.1 of the Company’s Form 8-K filed with the Commission on May 9, 2024 Exhibit 3.1 Conformed Copy CERTIFICATE OF AMENDMENT TO RESTATED CERTIFICATE OF INCORPORATION OF AXCELIS TECHNOLOGIES, INC. It is hereby certified that: 1. The name of the corporation (hereinafter called the “Corporation”) is Axcelis Technologies, Inc. The name under which the Corporation was originally incorporated is Eaton Semiconductor Equipment Inc. The Corporation’s original Certificate of Inc
May 9, 2024	8-K	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events, Submission of Matters to a Vote of Security Holders, Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 9, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
May 2, 2024	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2024 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00
May 1, 2024	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 1, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
May 1, 2024	EX-99.1	Axcelis Announces Financial Results for First Quarter 2024 Revenue, Gross Margin and EPS Beat Guidance Exhibit 99.1 News Release Axcelis Announces Financial Results for First Quarter 2024 Revenue, Gross Margin and EPS Beat Guidance BEVERLY, Mass. — May 1, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2024. The Company reported first quarter revenue of $252.4 million, compared to $310.3 million for the fourth quarter of 2023. G
March 29, 2024	DEF 14A	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule
March 29, 2024	ARS	ARS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K* (Mark One) ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2023 TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TEC
March 8, 2024	PRE 14A	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☒ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☒ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule
February 29, 2024	EX-99.1	AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS Exhibit 99.1 News Release AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS BEVERLY, Mass., Feb. 28, 2024 - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that Gregory Graves and Necip Sayiner have been elected to the Company’s Board of Directors. “We are pleased to welcome Gregory
February 29, 2024	8-K	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 28, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe
February 28, 2024	10-K/A	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K/A (Amendment No. 1) UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K/A (Amendment No. 1) (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2023 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-3094
February 23, 2024	EX-19.1	2023 Insider Trading Policy, as adopted by the Board of Directors on August 10, 2023. Filed herewith ‌Exhibit 19.1 Insider Trading Policy Axcelis Technologies, Inc. 108 Cherry Hill Drive Beverly, MA 01915 Company Policy as Dictated by Federal Law There are certain federal laws and regulations that public companies must abide by in order to protect themselves, their employees, and their shareholders. The federal laws prohibiting what is commonly known as “insider trading” are a prime example of su
February 23, 2024	EX-21.1	Subsidiaries of the Company. Filed herewith. Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2023 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axceli
February 23, 2024	EX-10.9	Non-Employee Director Cash Compensation at February 15, 2024. Filed herewith. Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2024 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: Annual Cash Retainers, paid quarterly in advance
February 23, 2024	10-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2023 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI
February 23, 2024	EX-10.14	Executive Compensation Clawback Policy, as adopted by the Board of Directors on August 10, 2023. Filed herewith ‌Exhibit 10.14 Axcelis Technologies, Inc. Executive Compensation Clawback Policy As adopted by the Board of Directors on August 10, 2023 Purpose The Board of Directors (the “Board”) of Axcelis Technologies, Inc. (the “Company”) believes that it is in the best interest of the Company and its shareholders to maintain a culture that emphasizes integrity and accountability and that reinforces the Comp
February 23, 2024	EX-10.8	Named Executive Officer Base Compensation at February 15, 2024. Filed herewith. Exhibit 10.8 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2024 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of: · the Company’s principal executive officer (Russell J. Low), · the Company’s principal financial officer (James G. Coogan), and ● the three most hig
February 13, 2024	SC 13G/A	ACLS / Axcelis Technologies, Inc. / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment SC 13G/A 1 tv0382-axcelistechnologiesin.htm SCHEDULE 13G/A SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 7)* Name of issuer: Axcelis Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 29, 2023 Check the appropriate box t
February 9, 2024	SC 13G/A	ACLS / Axcelis Technologies, Inc. / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment SC 13G/A 1 p24-0214sc13ga.htm AXCELIS TECHNOLOGIES, INC. SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 2)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, par value $0.001 per share (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2023 (Date of Event Which Requires Filing of this State
February 7, 2024	EX-99.1	Axcelis Announces Financial Results for Fourth Quarter and Full Year 2023 Record Revenue for 2023, Achieving Year-Over-Year Growth of 23% Exhibit 99.1 News Release Axcelis Announces Financial Results for Fourth Quarter and Full Year 2023 Record Revenue for 2023, Achieving Year-Over-Year Growth of 23% BEVERLY, Mass. — Feb. 7, 2024—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2023. Highlights include: · Record full year revenue, operating profit and
February 7, 2024	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 7, 2024 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
January 19, 2024	SC 13G/A	ACLS / Axcelis Technologies, Inc. / BlackRock Inc. Passive Investment SC 13G/A 1 us0545402085011924.txt us0545402085011924.txt SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No: 15) AXCELIS TECHNOLOGIES INC - (Name of Issuer) Common Stock - (Title of Class of Securities) 054540208 - (CUSIP Number) December 31, 2023 - (Date of Event Which Requires Filing of this Statement) Check the appropri
November 2, 2023	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2023 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe
November 1, 2023	EX-99.1	Axcelis Announces Financial Results for Third Quarter 2023 Financial Results Continue to be Driven by Strong Purion Demand in the Global Silicon Carbide Power Device Market Exhibit 99.1 News Release Axcelis Announces Financial Results for Third Quarter 2023 Financial Results Continue to be Driven by Strong Purion Demand in the Global Silicon Carbide Power Device Market BEVERLY, Mass. — Nov. 1, 2023 — Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter of 2023. Highlights include: · The Company reported third quarter reven
November 1, 2023	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 1, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
September 5, 2023	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 5, 2023 Axcelis Technol UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): September 5, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe
August 3, 2023	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2023 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000
August 3, 2023	EX-4.1	Form of Indenture. Exhibit 4.1 Axcelis Technologies, Inc. and [ ], as Trustee INDENTURE Dated as of [ , ] TABLE OF CONTENTS Page ARTICLE 1 DEFINITIONS AND INCORPORATION BY REFERENCE 1 1.1 Definitions. 1 1.2 Other Definitions. 5 1.3 Incorporation by Reference of Trust Indenture Act. 6 1.4 Rules of Construction. 6 ARTICLE 2 THE SECURITIES 6 2.1 Issuable in Series. 6 2.2 Establishment of Terms of Series of Securities.
August 3, 2023	EX-FILING FEES	Calculation of Filing Fee Table. Exhibit 107 Calculation of Filing Fee Tables Form S-3 (Form Type) Axcelis Technologies, Inc.
August 3, 2023	S-3ASR	As filed with the Securities and Exchange Commission on August 3, 2023 TABLE OF CONTENTS As filed with the Securities and Exchange Commission on August 3, 2023 Registration No.
August 2, 2023	EX-99.1	Axcelis Announces Financial Results for Second Quarter 2023 Financial Results Exceed Guidance Driven by Strong Purion Demand and Strength in Power Devices Exhibit 99.1 News Release Axcelis Announces Financial Results for Second Quarter 2023 Financial Results Exceed Guidance Driven by Strong Purion Demand and Strength in Power Devices BEVERLY, Mass. — Aug. 2, 2023 — Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter of 2023. Highlights include: · The Company reported second quarter revenue of $274.0 mil
August 2, 2023	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 2, 2023 Axcelis Technologi UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 2, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o
May 18, 2023	EX-1.01	Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form. EX-1.01 2 tm2315965d1ex1-01.htm EXHIBIT 1.01 Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2022 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 48 suppliers that responded to the Company’s reasonable count
May 18, 2023	SD	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) OMB APPROVAL OMB Number: 3235-0697 Expires: July 31, 2024 Estimated average burden hours per response.
May 12, 2023	EX-10.1	Employment Agreement between the Company and Russell J. Low dated May 11, 2023. Incorporated by reference to Exhibit 10.1 of the Company’s report on Form 8-K filed with the Commission on May 12, 2023 Exhibit 10.1 Exec Copy - conformed AXCELIS TECHNOLOGIES, INC. EMPLOYMENT AGREEMENT [Russell J. Low, Ph.D.] The parties to this Employment Agreement are AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the “Company”), and Russell J. Low, Ph.D., an individual residing in the Commonwealth of Massachusetts (the “Executive”). This Employment Agreement provides for the continued employment of the Exe
May 12, 2023	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 11, 2023 Axcelis Technologies UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 11, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of
May 5, 2023	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2023 or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00
May 3, 2023	EX-99.1	Axcelis Announces Financial Results for First Quarter 2023 Strength in Silicon Carbide Power Devices and Strong Purion Demand Drives Revenue Growth and Record Backlog Exhibit 99.1 News Release Axcelis Announces Financial Results for First Quarter 2023 Strength in Silicon Carbide Power Devices and Strong Purion Demand Drives Revenue Growth and Record Backlog BEVERLY, Mass. — May 3, 2023 — Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter of 2023. Highlights include: · The Company reported first quarter revenue of $
May 3, 2023	8-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 3, 2023 Axcelis Technologies, UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 3, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
April 18, 2023	8-K	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 24, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe
April 18, 2023	EX-10.1	2023 Amended and Restated Employment Agreement between the Company and Mary G. Puma dated February 24, 2023. Incorporated by reference to Exhibit 10.1 of the Company’s report on Form 8-K filed with the Commission on April 18, 2023 Exhibit 10.1 Conformed Exec Copy AXCELIS TECHNOLOGIES, INC. 2023 AMENDED AND RESTATED EMPLOYMENT AGREEMENT Mary G. Puma The parties to this 2023 Amended and Restated Employment Agreement, dated as of February 24, 2023 (“Agreement”), are AXCELIS TECHNOLOGIES, INC., a Delaware, USA, corporation (the “Company”), and MARY G. PUMA, an individual residing in the State of New Hampshire, USA (the “Executi
April 10, 2023	SC 13G/A	ACLS / Axcelis Technologies Inc / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 6)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: March 31, 2023 Check the appropriate box to designate the rule pursuant to which this Schedule is filed
March 31, 2023	DEF 14A	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ☐ Filed by a Party other than the Registrant ☐ Check the appropriate box: ☐ Preliminary Proxy Statement ☐ Confidential, for Use of the Commission Only (as permitted by Rule
March 31, 2023	ARS	ARS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2022 ☐ ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNO
February 24, 2023	EX-21.1	Subsidiaries of the Company. Filed herewith. Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2022 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axceli
February 24, 2023	EX-10.8	Named Executive Officer Base Compensation at February 15, 2023. Filed herewith. Exhibit 10.8 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 15, 2023 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of: · the Company’s principal executive officer (Mary G. Puma), · the Company’s principal financial officer (Kevin J. Brewer), and · the three most highl
February 24, 2023	EX-10.15	Executive Compensation Clawback Policy, as adopted by the Board of Directors on November 13, 2014. Filed herewith ‌Exhibit 10.15 Axcelis Technologies Inc. Executive Compensation Clawback Policy As adopted by the Board of Directors on November 13, 2014 Definitions For the purposes of this policy, the following definitions apply: ● “Board” shall mean the Board of Directors of the Company, provided that any executive officer serving on the Board of Directors will not participate in any vote relating to a determi
February 24, 2023	10-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2022 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI
February 24, 2023	EX-10.9	Non-Employee Director Cash Compensation at February 15, 2023. Filed herewith. Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 15, 2023 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: Annual Cash Retainers, paid quarterly in advance
February 10, 2023	SC 13G/A	ACLS / Axcelis Technologies Inc / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment SC 13G/A 1 p23-0626sc13ga.htm AXCELIS TECHNOLOGIES, INC. SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 1)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, par value $0.001 per share (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2022 (Date of Event Which Requires Filing of this State
February 9, 2023	SC 13G/A	ACLS / Axcelis Technologies Inc / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 5)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 30, 2022 Check the appropriate box to designate the rule pursuant to which this Schedule is fi
February 8, 2023	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 8, 2023 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
February 8, 2023	EX-99.1	Axcelis Announces Financial Results for Fourth Quarter and Full Year 2022 Achieved Record Annual Revenue, Gross Margin and EPS Exhibit 99.1 News Release Axcelis Announces Financial Results for Fourth Quarter and Full Year 2022 Achieved Record Annual Revenue, Gross Margin and EPS BEVERLY, Mass. — Feb. 8, 2023—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2022. Highlights include: · Record full year revenue, gross margin and EPS, enabling
January 26, 2023	SC 13G/A	ACLS / Axcelis Technologies Inc / BlackRock Inc. Passive Investment SC 13G/A 1 us0545402085012623.txt us0545402085012623.txt SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No: 14) AXCELIS TECHNOLOGIES INC - (Name of Issuer) Common Stock - (Title of Class of Securities) 054540208 - (CUSIP Number) December 31, 2022 - (Date of Event Which Requires Filing of this Statement) Check the appropri
January 20, 2023	SC 13G/A	ACLS / Axcelis Technologies Inc / BlackRock Inc. Passive Investment SC 13G/A 1 us0545402085011923.txt us0545402085011923.txt SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No: 13) AXCELIS TECHNOLOGIES INC - (Name of Issuer) Common Stock - (Title of Class of Securities) 054540208 - (CUSIP Number) December 31, 2022 - (Date of Event Which Requires Filing of this Statement) Check the appropri
November 3, 2022	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.
November 3, 2022	EX-10.1	Axcelis Technologies, Inc. 2012 Equity Incentive Plan, as approved by stockholders on May 14, 2019 and as amended by the Board of Directors on August 11, 2022. Incorporated by reference to Exhibit 10.1 of the Company’s Form 10-Q for the quarter ended September 30, 2022 filed with the Commission on November 3, 2022 ? Exhibit 10.1 ? AXCELIS TECHNOLOGIES, INC. 2012 EQUITY INCENTIVE PLAN As approved by the Stockholders on May 2, 2012, May 14, 2013, May 13, 2014, May 13, 2015, and May 4, 2016; as adjusted for the reverse stock split on June 30, 2016; as amended by the Board of Directors on February 15, 2017 (Stockholder approval not required); as approved by the Stockholders on May 16, 2017; as amended by the Bo
November 2, 2022	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2022 System Backlog Continues to Hit Record Levels Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2022 System Backlog Continues to Hit Record Levels BEVERLY, Mass. ? Nov. 2, 2022?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter of 2022. Highlights for the third quarter are as follows: ? Revenue for the quarter was $229.2 million, compared to $221.2 million for the se
November 2, 2022	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 2, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
October 27, 2022	SC 13G	ACLS / Axcelis Technologies Inc / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, par value $0.001 per share (Title of Class of Securities) 054540208 (CUSIP Number) October 20, 2022 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuan
October 7, 2022	SC 13G/A	ACLS / Axcelis Technologies Inc / PRIMECAP MANAGEMENT CO/CA/ - PRIMECAP MANAGEMENT CO/CA/ Passive Investment UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 10)* Axcelis Technologies, Inc. (Name of Issuer) COM (Title of Class of Securities) 054540208 (CUSIP Number) September 30, 2022 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sch
August 4, 2022	EX-10.1	2022 Amended and Restated Employment Agreement between the Company and Mary G. Puma dated May 24, 2022. Filed herewith. ? Exhibit 10.1 ? AXCELIS TECHNOLOGIES, INC. 2022 AMENDED AND RESTATED EMPLOYMENT AGREEMENT Mary G. Puma ? The parties to this 2022 Amended and Restated Employment Agreement, dated as of May 24, 2022 (?Agreement?), are AXCELIS TECHNOLOGIES, INC., a Delaware, USA, corporation (the ?Company?), and MARY G. PUMA, an individual residing in the State of New Hampshire, USA (the ?Executive?). The Company a
August 4, 2022	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.
August 3, 2022	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 3, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o
August 3, 2022	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2022 System Bookings and Backlog Continue to Hit Record Levels Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2022 System Bookings and Backlog Continue to Hit Record Levels BEVERLY, Mass. ? Aug. 3, 2022?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter 2022. Highlights for the second quarter are as follows: ? The Company reported second quarter revenue of $221.2 million, compar
May 20, 2022	EX-1.01	Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form. Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2021 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the ?Company?). As noted in the Form SD, 70 suppliers that responded to the Company?s reasonable country of origin inquiry survey (representing 24%
May 20, 2022	SD	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) SD 1 tm2215963d1sd.htm SD OMB APPROVAL OMB Number: 3235-0697 Expires: March 31, 2023 Estimated average burden hours per response....476.12 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware, USA (State or other jurisdiction of incorporation or organi
May 11, 2022	EX-3.2	Bylaws of the Company, as amended as of May 11, 2022. Incorporated by reference to Exhibit 3.2 of the Company’s Form 8-K filed with the SEC on May 11, 2022. Exhibit 3.2 BY-LAWS OF AXCELIS TECHNOLOGIES, INC. Effective on May 11, 2022 ARTICLE I STOCKHOLDERS SECTION 1.1. Place of Meetings. All meetings of stockholders shall be held at the principal office of the corporation or at such other place as may be named in the notice. SECTION 1.2. Annual Meeting. The annual meeting of stockholders for the election of directors and the transaction of such other b
May 11, 2022	8-K	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Amendments to Articles of Incorporation or Bylaws; Change in Fiscal Year, Financial Statements and Exhibits, Other Events, Submission of Matters to a Vote of Security Holders UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 10, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of
May 11, 2022	EX-3.1	Bylaws of the Company, as amended and restated as of May 11, 2022. Incorporated by reference to Exhibit 3.1 of the Company’s Form 8-K filed with the Commission on May 11, 2022 Exhibit 3.1 BY-LAWS OF AXCELIS TECHNOLOGIES, INC. Effective on May 11, 2022 ARTICLE I STOCKHOLDERS SECTION 1.1. Place of Meetings. All meetings of stockholders shall be held at the principal office of the corporation or at such other place as may be named in the notice. SECTION 1.2. Annual Meeting. The annual meeting of stockholders for the election of directors and the transaction of such other b
May 5, 2022	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.
May 4, 2022	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 4, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
May 4, 2022	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2022 Demand Drives Record Bookings and Backlog, Company Expects to Exceed Revenue of $850 Million in 2022 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2022 Demand Drives Record Bookings and Backlog, Company Expects to Exceed Revenue of $850 Million in 2022 BEVERLY, Mass. ? May 4, 2022?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter 2022. Highlights for the first quarter are as follows: ? The Company reported first qua
March 30, 2022	DEF 14A	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) TABLE OF CONTENTS UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ??) Filed by the Registrant ? Filed by a Party other than the Registrant ? Check the appropriate box: ? Preliminary Proxy Statement ? Confidential, for Use of the Commission Only (as permitted by Rule
February 25, 2022	EX-10.9	Non-Employee Director Cash Compensation at February 25, 2022. Filed herewith. Exhibit 10.9 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 25, 2022 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the ?Company?) and each of its non-employee directors. Axcelis provides cash retainers to its non-employee directors, as follows: ? ? Annual Cash Retainers, paid quarterly in adva
February 25, 2022	EX-10.8	Named Executive Officer Base Compensation at February 25, 2022. Filed herewith. Exhibit 10.8 ? Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 25, 2022 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the ?Company?) and each of: ? the Company?s principal executive officer (Mary G. Puma), ? the Company?s principal financial officer (Kevin J. Brewer), and ? the three most hig
February 25, 2022	EX-21.1	Subsidiaries of the Company. Filed herewith. Exhibit 21.1 ? Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2021 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axce
February 25, 2022	10-K	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 ? FORM 10-K ? (Mark One) ? ? ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2021 ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 ? ? For the transition period from to ? Commission file number 000-30941 ? AX
February 24, 2022	8-K	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Financial Statements and Exhibits, Other Events UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 23, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe
February 24, 2022	EX-99.1	AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS Exhibit 99.1 News Release AXCELIS STRENGTHENS ITS BOARD WITH THE ELECTION OF TWO DIRECTORS BEVERLY, Mass., Feb. 23, 2022 - Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, announced today that Dipti Vachani and Jeanne Quirk have been elected to the Company?s Board of Directors. ?We are pleased to welcome Dipti and
February 10, 2022	SC 13G/A	ACLS / Axcelis Technologies Inc / PRIMECAP MANAGEMENT CO/CA/ - PRIMECAP MANAGEMENT CO/CA/ Passive Investment UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 9)* Axcelis Technologies, Inc. (Name of Issuer) COM (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2021 (Date of Event which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which this Sched
February 9, 2022	SC 13G/A	ACLS / Axcelis Technologies Inc / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 7)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2021 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w
February 9, 2022	SC 13G/A	ACLS / Axcelis Technologies Inc / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment SC 13G/A 1 tv0360-axcelistechnologiesin.htm SCHEDULE 13G/A SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 4)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2021 Check the appropriate box
February 8, 2022	SC 13G/A	ACLS / Axcelis Technologies Inc / DIMENSIONAL FUND ADVISORS LP - SEC SCHEDULE 13G Passive Investment UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 5 )* Axcelis Technologies Inc (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2021 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which th
February 7, 2022	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 7, 2022 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
February 7, 2022	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2021 Company Reports Record Full Year Revenue, Gross Margin and Operating Profit Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2021 Company Reports Record Full Year Revenue, Gross Margin and Operating Profit BEVERLY, Mass. ? Feb. 7, 2022 ? Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2021. Highlights include: ? Record full year revenue, operat
January 28, 2022	SC 13G/A	ACLS / Axcelis Technologies Inc / BlackRock Inc. Passive Investment us0545402085012822.txt SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No: 12) AXCELIS TECHNOLOGIES INC - (Name of Issuer) Common Stock - (Title of Class of Securities) 054540208 - (CUSIP Number) December 31, 2021 - (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule purs
November 5, 2021	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.
November 3, 2021	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 3, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
November 3, 2021	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2021 The Company Reports Record Implant Systems Revenue and Backlog Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2021 The Company Reports Record Implant Systems Revenue and Backlog BEVERLY, Mass. ? November 3, 2021?Axcelis Technologies, Inc. (Nasdaq: ACLS), a leading supplier of enabling ion implantation solutions for the semiconductor industry, today announced financial results for the third quarter ended September 30, 2021. Hig
August 6, 2021	10-Q	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.
August 4, 2021	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2021 The Company Expects 2021 Revenue to Exceed $625M Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2021 The Company Expects 2021 Revenue to Exceed $625M BEVERLY, Mass. ? August 4, 2021?Axcelis Technologies, Inc. (Nasdaq: ACLS), a lending supplier of enabling ion implantation solutions for the semiconductor industry, today announced financial results for the second quarter ended June 30, 2021. Highlights for the sec
August 4, 2021	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): August 4, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o
May 18, 2021	SD	UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM SD Specialized Disclosure Report AXCELIS TECHNOLOGIES, INC. (Exact name of registrant as specified in its charter) Delaware, USA (State or other jurisdiction of incorporatio OMB APPROVAL OMB Number: 3235-0697 Expires: March 31, 2023 Estimated average burden hours per response.
May 18, 2021	EX-1.01	Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2020 Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2020 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the ?Company?). As noted in the Form SD, 84 suppliers that responded to the Company?s reasonable country of origin inquiry survey (representing 24%
May 13, 2021	8-K	Other Events, Submission of Matters to a Vote of Security Holders UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 12, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of
May 6, 2021	10-Q	Quarterly Report - 10-Q Table of Contents ? ? ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.
May 6, 2021	EX-33.2	Certification of the Principal Financial Officer pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code (Section 906 of the Sarbanes-Oxley Act), dated May 6, 2021. Filed herewith. ? EXHIBIT 32.2 ? AXCELIS TECHNOLOGIES, INC. Certification of the Principal Financial Officer Pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code ? The undersigned Chief Financial Officer of Axcelis Technologies, Inc., a Delaware corporation, hereby certifies, for the purposes of Section 1350 of Chapter 63 of title 18 of the United States Code (as implemented by Section 906
May 6, 2021	EX-10.1	First Amendment to Credit Agreement effective as of March 25, 2021, amending the Senior Secured Credit Facilities Credit Agreement dated as of July 31, 2020 among the Company, the several banks and other financial institutions or entities party thereto, and Silicon Valley Bank. Filed herewith. Exhibit 10.1 FIRST AMENDMENT TO CREDIT AGREEMENT This First Amendment to Credit Agreement (this ?Amendment?) dated and effective as of March 25, 2021 (the ?First Amendment Effective Date?) by and among AXCELIS TECHNOLOGIES, INC., a Delaware corporation (the ?Borrower?), the several banks and other financial institutions or entities party hereto (the ?Lenders?) and SILICON VALLEY BANK (?SVB?), as t
May 6, 2021	EX-33.1	Certification of the Principal Executive Officer pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code (Section 906 of the Sarbanes-Oxley Act), dated May 6, 2021. Filed herewith. ? EXHIBIT 32.1 ? AXCELIS TECHNOLOGIES, INC. Certification of the Principal Executive Officer Pursuant to Section 1350 of Chapter 63 of title 18 of the United States Code ? The undersigned Chief Executive Officer of Axcelis Technologies, Inc., a Delaware corporation, hereby certifies, for the purposes of Section 1350 of Chapter 63 of title 18 of the United States Code (as implemented by Section 906
May 4, 2021	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2021 The Company Expects to Exceed $550M Revenues in 2021 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2021 The Company Expects to Exceed $550M Revenues in 2021 BEVERLY, Mass. ? May 4, 2021?Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2021. Highlights for the first quarter are as follows: ? The Company reported first quarter revenue of $132.8 million,
May 4, 2021	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 4, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
March 25, 2021	DEF 14A	- DEF 14A Use these links to rapidly review the document PROXY STATEMENT - TABLE OF CONTENTS Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.
February 26, 2021	EX-10.12	Non-Employee Director Cash Compensation at February 26, 2021. Filed herewith. Exhibit 10.12 Axcelis Technologies, Inc. Non-Employee Director Cash Compensation at February 26, 2021 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the ?Company?) and each of its non-employee directors. Axcelis provides both cash retainers to its non-employee directors, as follows: ? ? Annual Cash Retainers, paid quarterly i
February 26, 2021	10-K	Annual Report - 10-K ? UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 ? FORM 10-K ? (Mark One) ? ? ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2020 ? TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 ? ? For the transition period from to ? Commission file number 000-30941 ? AX
February 26, 2021	EX-21.1	Subsidiaries of the Company. Filed herewith. Exhibit 21.1 ? Axcelis Technologies, Inc. Exhibit 21.1 to Form 10-K for the year ended December 31, 2020 Subsidiaries The following is a list of all direct and indirect wholly-owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1. Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2. Axcelis Technologies GmbH (Germany) 3. Axce
February 26, 2021	EX-10.11	Named Executive Officer Base Compensation at February 26, 2021. Filed herewith. Exhibit 10.11 ? Axcelis Technologies, Inc. Named Executive Officer Base Compensation at February 26, 2021 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the ?Company?) and each of: ? the Company?s principal executive officer (Mary G. Puma), ? the Company?s principal financial officer (Kevin J. Brewer), and ? the three most hi
February 12, 2021	SC 13G/A	SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 4 )* Axcelis Technologies Inc (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which th
February 12, 2021	SC 13G/A	SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 8 )* Axcelis Technologies Inc. (Name of Issuer) (Title of Class of Securities) (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) UNITED STATES OMB APPROVAL SECURITIES AND EXCHANGE COMMISSION OMB Number: 3235-0145 Washington, D.
February 12, 2021	SC 13G/A	Axcelis Technologies, Inc. SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 6)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w
February 10, 2021	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 10, 2021 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employe
February 10, 2021	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2020 Full Year 2020 Operating Income Increased 140% on a 38% Increase in Revenue Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2020 Full Year 2020 Operating Income Increased 140% on a 38% Increase in Revenue BEVERLY, Mass. — Feb. 10, 2021—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2020. The Company reported fourth quarter revenue of $122.2 m
February 10, 2021	SC 13G/A	SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 3)* SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 3)* Name of issuer: Axcelis Technologies Inc. Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2020 Check the appropriate box to designate the rule pursuant to which this Schedule is fi
February 4, 2021	SC 13G/A	SCHEDULE 13G UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 4 )* Axcelis Technologies, Inc. (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2020 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which
January 26, 2021	SC 13G/A	SC 13G/A us0545402085012621.txt SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No: 11) AXCELIS TECHNOLOGIES INC - (Name of Issuer) Common Stock - (Title of Class of Securities) 054540208 - (CUSIP Number) December 31, 2020 - (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule purs
November 6, 2020	10-Q	Quarterly Report - 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended September 30, 2020 Or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file numbe
November 6, 2020	EX-10.2	Guarantee and Collateral Agreement dated as of July 31, 2020 made by the Company and the other grantors referred to therein in favor of Silicon Valley Bank, as Administrative Agent. Incorporated by reference to Exhibit 10.2 of the Company’s Form 10-Q for the quarter ended September 30, 2020 filed with the Commission on November 6, 2020. Exhibit 10.2 Execution Version GUARANTEE AND COLLATERAL AGREEMENT Dated as of July 31, 2020 made by AXCELIS TECHNOLOGIES, INC. and the other Grantors referred to herein, in favor of SILICON VALLEY BANK, as Administrative Agent TABLE OF CONTENTS Page SECTION 1. DEFINED TERMS. 1 1.1 Definitions. 1 1.2 Other Definitional Provisions 5 SECTION 2. GUARANTEE. 5 2.1 Guarantee 5 2.2 Right of Contribution 6
November 6, 2020	EX-10.1	Senior Secured Credit Facilities Credit Agreement dated as of July 31, 2020, among the Company, as the Borrower, the several lenders from time to time party thereto, and Silicon Valley Bank, as Administrative Agent, Issuing Lender and Swingline Lender, and as Lead Arranger. Incorporated by reference to Exhibit 10.1 of the Company’s Form 10-Q for the quarter ended September 30, 2020 filed with the Commission on November 6, 2020 Exhibit 10.1 Execution Version SENIOR SECURED CREDIT FACILITIES CREDIT AGREEMENT dated as of July 31, 2020, among AXCELIS TECHNOLOGIES, INC., as the Borrower, THE SEVERAL LENDERS FROM TIME TO TIME PARTY HERETO, and SILICON VALLEY BANK, as Administrative Agent, Issuing Lender and Swingline Lender, and as Lead Arranger Table of Contents Page SECTION 1 DEFINITIONS 1 1.1 Defined Terms 1 1.2 Other Defi
November 5, 2020	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition - FORM 8-K UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): November 5, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer
November 5, 2020	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2020 Company Reports Strong Earnings Driven by Robust Gross Margins Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR THIRD QUARTER 2020 Company Reports Strong Earnings Driven by Robust Gross Margins BEVERLY, Mass. — Nov. 5, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the third quarter ended September 30, 2020. The Company reported third quarter revenue of $110.4 million, compared to $123 million for the sec
August 5, 2020	10-Q	Quarterly Report - 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) ☒ QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended June 30, 2020 Or ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000
August 4, 2020	8-K	Entry into a Material Definitive Agreement, Financial Statements and Exhibits, Creation of a Direct Financial Obligation or an Obligation under an Off-Balance Sheet Arrangement of a Registrant, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): July 31, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of
August 4, 2020	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2020 Company Reports Strong Financial Performance Exhibit 99.1 AXCELIS ANNOUNCES FINANCIAL RESULTS FOR SECOND QUARTER 2020 Company Reports Strong Financial Performance BEVERLY, Mass. — August 4, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the second quarter ended June 30, 2020. The Company reported second quarter revenue of $123 million, compared to $119 million for the first quarter of 2020. Operating pro
May 29, 2020	S-3ASR	- S-3ASR Use these links to rapidly review the document TABLE OF CONTENTS Table of Contents As filed with the Securities and Exchange Commission on May 29, 2020 Registration No.
May 29, 2020	EX-99.1	Axcelis Technologies, Inc. 2020 Employee Stock Purchase Plan, adopted by the stockholders on May 19, 2020. Exhibit 99.1 AXCELIS TECHNOLOGIES, INC. 2020 EMPLOYEE STOCK PURCHASE PLAN As adopted by the Board of Directors on August 15, 2019 and by the Stockholders on May 19, 2020 Adopted effective July 1, 2020 1. PURPOSE. The purpose of this Plan is to provide an opportunity for Employees of Axcelis Technologies, Inc. (the "Company") and its Designated Subsidiaries, to purchase Common Stock of the Company
May 29, 2020	S-8	- S-8 As filed with the Securities and Exchange Commission on May 29, 2020 REGISTRATION NO.
May 29, 2020	EX-4.1	Form of Indenture. Exhibit 4.1 Axcelis Technologies, Inc. and [ ], as Trustee INDENTURE Dated as of [ , ] TABLE OF CONTENTS Page ARTICLE 1 DEFINITIONS AND INCORPORATION BY REFERENCE 1 1.1 Definitions. 1 1.2 Other Definitions. 5 1.3 Incorporation by Reference of Trust Indenture Act. 5 1.4 Rules of Construction. 6 ARTICLE 2 THE SECURITIES 6 2.1 Issuable in Series. 6 2.2 Establishment of Terms of Series of Securities.
May 22, 2020	EX-1.01	Exhibit 1.01 — Conflict Minerals Report as required by Items 1.01 and 1.02 of this Form Exhibit 1.01 Axcelis Technologies, Inc. Conflict Minerals Report Products for which manufacturing was completed during the year ended December 31, 2019 This conflict minerals report is filed as an exhibit to Form SD filed by Axcelis Technologies, Inc. (the “Company”). As noted in the Form SD, 70 suppliers that responded to the Company’s reasonable country of origin inquiry survey (representing 20%
May 22, 2020	SD	- SD OMB APPROVAL OMB Number: 3235-0697 Expires: March 31, 2023 Estimated average burden hours per response.
May 21, 2020	8-K	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Other Events, Submission of Matters to a Vote of Security Holders UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 19, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of
May 21, 2020	8-K/A	Departure of Directors or Certain Officers; Election of Directors; Appointment of Certain Officers; Compensatory Arrangements of Certain Officers, Other Events, Submission of Matters to a Vote of Security Holders UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K/A CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 19, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer o
May 6, 2020	10-Q	Quarterly Report - 10-Q Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-Q (Mark One) x QUARTERLY REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the quarterly period ended March 31, 2020 Or o TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 00
May 5, 2020	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): May 5, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer of i
May 5, 2020	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2020 Company Reports Continued Strong Demand for Purion Products EX-99.1 2 tm2018531d1ex99-1.htm EXHIBIT 99.1 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FIRST QUARTER 2020 Company Reports Continued Strong Demand for Purion Products BEVERLY, Mass. — May 5, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the first quarter ended March 31, 2020. The Company reported first quarter revenue of $119 million, c
March 30, 2020	DEF 14A	the portions of our definitive Proxy Statement for our Annual Meeting of Stockholders held on May 19, 2020, filed with the SEC on March 30, 2020, that are considered "filed" and not "furnished" under the Exchange Act; DEF 14A 1 a2240881zdef14a.htm DEF 14A Use these links to rapidly review the document PROXY STATEMENT - TABLE OF CONTENTS Table of Contents UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 14A Proxy Statement Pursuant to Section 14(a) of the Securities Exchange Act of 1934 (Amendment No. ) Filed by the Registrant ý Filed by a Party other than the Registrant o Check t
March 2, 2020	EX-4.4	Description of Securities Registered under Section 12 of the Securities Exchange Act of 1934. Incorporated by reference to Exhibit 4.4 of the Company’s Form 10-K for the year ended December 31, 2019 filed with the Commission on March 2, 2020. Exhibit 4.4 Axcelis Technologies, Inc. Description of Securities Registered under Section 12 of the Securities Exchange Act of 1934 Our common stock, par value $0.001 per share, stock is the only class of our securities registered under the Exchange Act. We are authorized to issue 75,000,000 shares of common stock. Below is a summary of the material rights of our common stock. This summary is qual
March 2, 2020	EX-10.12	Non‑Employee Director Cash Compensation at March 02, 2020. Filed herewith. Exhibit 10.12 Axcelis Technologies, Inc. Non‑Employee Director Cash Compensation at March 2, 2020 This Exhibit discloses the current understandings with respect to cash compensation between Axcelis Technologies, Inc. (the “Company”) and each of its non‑employee directors. Axcelis provides both cash retainers to its non‑employee directors, as follows: Annual Cash Retainers, paid quarterly in advanc
March 2, 2020	EX-21.1	Subsidiaries of the Company. Filed herewith. Exhibit 21.1 Axcelis Technologies, Inc. Exhibit 21.1 to Form 10‑K for the year ended December 31, 2019 Subsidiaries The following is a list of all direct and indirect wholly‑owned subsidiaries of Axcelis Technologies, Inc. as of the date hereof: Domestic Subsidiaries 1.Axcelis Technologies (Israel) Inc., a Delaware corporation European Subsidiaries 2.Axcelis Technologies GmbH (Germany) 3.Axcelis T
March 2, 2020	EX-10.11	Named Executive Officer Base Compensation at March 02, 2020. Filed herewith. Exhibit 10.11 Axcelis Technologies, Inc. Named Executive Officer Base Compensation at March 02, 2020 This Exhibit discloses the current understandings with respect to base compensation between Axcelis Technologies, Inc. (the “Company”) and each of:  the Company’s principal executive officer (Mary G. Puma),  the Company’s principal financial officer (Kevin J. Brewer), and  the three most highly
March 2, 2020	10-K	annual report on Form 10-K for the year ended December 31, 2019 UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 10-K (Mark One) ☒ ANNUAL REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the fiscal year ended December 31, 2019 ☐ TRANSITION REPORT PURSUANT TO SECTION 13 OR 15(d) OF THE SECURITIES EXCHANGE ACT OF 1934 For the transition period from to Commission file number 000-30941 AXCELIS TECHNOLOGI
February 12, 2020	SC 13G/A	ACLS / Axcelis Technologies, Inc. / PRIMECAP MANAGEMENT CO/CA/ - SC 13G/A Passive Investment UNITED STATES OMB APPROVAL SECURITIES AND EXCHANGE COMMISSION OMB Number: 3235-0145 Washington, D.
February 12, 2020	SC 13G/A	ACLS / Axcelis Technologies, Inc. / DIMENSIONAL FUND ADVISORS LP - SCHEDULE 13G/A Passive Investment UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G Under the Securities Exchange Act of 1934 (Amendment No. 3)* AXCELIS TECHNOLOGIES INC (Name of Issuer) Common Stock (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2019 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to which thi
February 12, 2020	SC 13G/A	ACLS / Axcelis Technologies, Inc. / VANGUARD GROUP INC - SCHEDULE 13G/A Passive Investment SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 Schedule 13G Under the Securities Exchange Act of 1934 (Amendment No.: 2)* Name of issuer: Axcelis Technologies Inc Title of Class of Securities: Common Stock CUSIP Number: 054540208 Date of Event Which Requires Filing of this Statement: December 31, 2019 Check the appropriate box to designate the rule pursuant to which this Schedule is fil
February 7, 2020	SC 13G/A	ACLS / Axcelis Technologies, Inc. / Senvest Management, LLC - AXCELIS TECHNOLOGIES, INC. Passive Investment SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 SCHEDULE 13G/A Under the Securities Exchange Act of 1934 (Amendment No. 5)* Axcelis Technologies, Inc. (Name of Issuer) Common Stock, $0.001 par value (Title of Class of Securities) 054540208 (CUSIP Number) December 31, 2019 (Date of Event Which Requires Filing of this Statement) Check the appropriate box to designate the rule pursuant to w
February 5, 2020	EX-99.1	AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2019 Company Reports 94% Increase in Fourth Quarter System Revenues EX-99.1 2 tm206672d1ex99-1.htm EXHIBIT 99.1 Exhibit 99.1 News Release AXCELIS ANNOUNCES FINANCIAL RESULTS FOR FOURTH QUARTER AND FULL YEAR 2019 Company Reports 94% Increase in Fourth Quarter System Revenues BEVERLY, Mass. — Feb. 5, 2020—Axcelis Technologies, Inc. (Nasdaq: ACLS) today announced financial results for the fourth quarter and full year ended December 31, 2019. The Company reported four
February 5, 2020	8-K	Financial Statements and Exhibits, Results of Operations and Financial Condition UNITED STATES SECURITIES AND EXCHANGE COMMISSION Washington, D.C. 20549 FORM 8-K CURRENT REPORT Pursuant to Section 13 or 15(d) of the Securities Exchange Act of 1934 Date of Report (Date of earliest event reported): February 5, 2020 Axcelis Technologies, Inc. (Exact name of registrant as specified in its charter) Delaware 000-30941 34-1818596 (State or other jurisdiction (Commission (IRS Employer

DE:XXA1	133,60 €
IT:1ACLS	134,35 €

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