Onto Innovation Inc.
US ˙ NYSE ˙ US6833441057

SecurityONTO / Onto Innovation Inc.
InstitutionMorgan Stanley
Latest Disclosed Ownership436,025 shares
Latest Disclosed Value $ 89,415,897
Morgan Stanley reports 6.67% decrease in ownership of ONTO / Onto Innovation Inc.

On May 15, 2026 - Morgan Stanley filed a 13F-HR form disclosing ownership of 436,025 shares of Onto Innovation Inc. (US:ONTO) valued at $89,415,647 USD as of March 31, 2026. The entity filed a previous 13F-HR/A on May 27, 2026 disclosing 467,189 shares of Onto Innovation Inc.. This represents a change in shares of -6.67% during the quarter. The current value of the position is $119,802,229 USD.

Institutional Ownership: 13F and NPORT Filings

The Security and Class in the table below are shown exactly as filed by the investor. We do our best to track continuity of investments through acquisitions, and this will be reflected in the table as changes in names. In addition to descriptive data, performance of the investment is shown over time. To calculate quarterly performance, we first calculate cost basis of the shares purchased during the quarter, then use that to calculate gross profit. Quarterly return is Gross Profit / Starting Portfolio value.

Note that cost basis is calculated and stored in thousands, so small quarterly changes in shares frequently result in a cost basis of zero.

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Disclosed Equity Positions (from 13F/NPORT Filings)
File
Date		 Effective
Date		Form Security Class ID Avg Price
Paid (Est)		 Reported
Shares		 ΔShares ΔShares
(%)		 Reported
Value
(x1000)		 ΔValue
(%)		 Alloc
(%)		 ΔAlloc ΔAlloc (%) Cost Basis
(x1000)		 Unrealized
Gain/Loss
(x1000)
2026-05-15 2026-03-31 13F ONTO INNOVATION COM 683344105 436,025 -31,164 -6.67 89,416 21.24 0.0054
2026-05-27 2025-12-31 13F/A-1 ONTO INNOVATION COM 683344105 467,189 -323,254 -40.90 73,751 -27.80 0.0044
2026-02-13 2025-12-31 13F ONTO INNOVATION COM 683344105 467,189 -323,254 73,751 0.0044
2026-05-27 2025-09-30 13F/A-1 ONTO INNOVATION COM 683344105 790,443 338,607 74.94 102,141 123.97 0.0062
2025-11-14 2025-09-30 13F ONTO INNOVATION COM 683344105 790,443 338,607 102,141 0.0062
2025-08-15 2025-06-30 13F ONTO INNOVATION COM 683344105 451,836 163,361 56.63 45,604 30.29 0.0030
2025-05-15 2025-03-31 13F ONTO INNOVATION COM 683344105 288,475 -31,510 -9.85 35,004 -34.37 0.0025
2025-05-15 2024-12-31 13F/A-1 ONTO INNOVATION COM 683344105 319,985 -42,951 -11.83 53,332 -29.20 0.0037
2025-02-14 2024-12-31 13F ONTO INNOVATION COM 683344105 319,985 -42,951 53,332 0.0037
2025-05-14 2024-09-30 13F/A-2 ONTO INNOVATION COM 683344105 362,936 35,437 10.82 75,331 4.76 0.0055
2025-02-14 2024-09-30 13F/A-1 ONTO INNOVATION COM 683344105 362,936 35,437 75,331 0.0055
2024-11-14 2024-09-30 13F ONTO INNOVATION COM 683344105 362,936 35,437 75,331 0.0006
2025-05-14 2024-06-30 13F/A-2 ONTO INNOVATION COM 683344105 327,499 67,635 26.03 71,906 52.81 0.0056
2024-10-17 2024-06-30 13F/A-1 ONTO INNOVATION COM 683344105 327,499 67,635 71,906 0.0056
2024-08-14 2024-06-30 13F ONTO INNOVATION COM 683344105 327,499 67,635 71,906 0.0056
2024-10-17 2024-03-31 13F/A-2 ONTO INNOVATION COM 683344105 259,864 -84,678 -24.58 47,056 -10.68 0.0038
2024-08-16 2024-03-31 13F/A-1 ONTO INNOVATION COM 683344105 259,864 -84,678 47,056 0.0004
2024-05-15 2024-03-31 13F ONTO INNOVATION COM 683344105 259,864 -84,678 47,056 0.0038
2024-08-16 2023-12-31 13F/A-1 ONTO INNOVATION COM 683344105 344,542 -79,478 -18.74 52,681 -2.57 0.0046
2024-02-13 2023-12-31 13F ONTO INNOVATION COM 683344105 344,542 -79,478 52,681 0.0046
2023-11-15 2023-09-30 13F ONTO INNOVATION COM 683344105 424,020 19,728 4.88 54,071 14.83 0.0055
2023-08-14 2023-06-30 13F ONTO INNOVATION COM 683344105 404,292 41,190 11.34 47,088 47.57 0.0046
2023-05-15 2023-03-31 13F ONTO INNOVATION COM 683344105 363,102 -3,530 -0.96 31,909 27.82 0.0034
2023-02-14 2022-12-31 13F ONTO INNOVATION COM 683344105 366,632 -28,321 -7.17 24,964 -1.32 0.0028
2022-11-14 2022-09-30 13F ONTO INNOVATION COM 683344105 394,953 -7,115 -1.77 25,298 -9.78 0.0034
2022-10-27 2022-06-30 13F/A-1 ONTO INNOVATION COM 683344105 402,068 198,025 97.05 28,041 58.16 0.0036
2022-08-15 2022-06-30 13F ONTO INNOVATION COM 683344105 402,068 198,025 28,041 0.0007
2022-10-27 2022-03-31 13F/A-1 ONTO INNOVATION COM 683344105 204,043 -60,910 -22.99 17,730 -33.90 0.0024
2022-05-13 2022-03-31 13F ONTO INNOVATION COM 683344105 204,043 -60,910 17,730 0.0024
2022-02-14 2021-12-31 13F ONTO INNOVATION COM 683344105 264,953 78,905 42.41 26,822 99.55 0.0033
2021-11-15 2021-09-30 13F ONTO INNOVATION COM 683344105 186,048 -25,752 -12.16 13,441 -13.12 0.0018
2021-08-23 2021-06-30 13F/A-1 ONTO INNOVATION COM 683344105 211,800 71,553 51.02 15,470 67.86 0.0020
2021-08-16 2021-06-30 13F ONTO INNOVATION COM 683344105 211,800 71,553 15,470 0.0004
2021-05-17 2021-03-31 13F ONTO INNOVATION COM 683344105 140,247 -39,018 -21.77 9,216 8.12 0.0014
2021-02-16 2020-12-31 13F ONTO INNOVATION COM 683344105 179,265 40,247 28.95 8,524 105.89 0.0013
2020-11-13 2020-09-30 13F ONTO INNOVATION COM 683344105 139,018 -10,547 -7.05 4,140 -18.68 0.0008
2020-08-14 2020-06-30 13F ONTO INNOVATION COM 683344105 149,565 -5,193 -3.36 5,091 10.87 0.0011
2020-05-26 2020-03-31 13F/A-1 ONTO INNOVATION COM 683344105 154,758 -150,255 -49.26 4,592 -58.80 0.0012
2020-05-15 2020-03-31 13F ONTO INNOVATION COM 683344105 154,758 -150,255 4,592 352.7613
2020-02-14 2019-12-31 13F ONTO INNOVATION COM 683344105 305,013 153,272 101.01 11,145 125.15 0.0026
2019-11-14 2019-09-30 13F NANOMETRICS COM 630077105 151,741 -30,921 -16.93 4,950 -21.92 0.0013
2019-08-14 2019-06-30 13F NANOMETRICS COM 630077105 182,662 43,886 31.62 6,340 47.96 0.0017
2019-05-15 2019-03-31 13F NANOMETRICS COM 630077105 138,776 -188,670 -57.62 4,285 -52.11 0.0012
2019-02-14 2018-12-31 13F NANOMETRICS COM 630077105 327,446 120,274 58.06 8,948 15.10 0.0027
2019-04-23 2018-09-30 13F/A-2 NANOMETRICS COM 630077105 207,172 -29,458 -12.45 7,774 -7.22 0.0019
2018-11-20 2018-09-30 13F/A-1 NANOMETRICS COM 630077105 207,172 0 7,774 0.0019
2018-11-14 2018-09-30 13F NANOMETRICS COM 630077105 207,172 -29,458 7,774
2019-04-23 2018-06-30 13F/A-1 NANOMETRICS COM 630077105 236,630 87,591 58.77 8,379 109.00 0.0023
2018-08-14 2018-06-30 13F NANOMETRICS COM 630077105 236,630 87,591 8,379
2019-04-23 2018-03-31 13F/A-1 NANOMETRICS COM 630077105 149,039 24,519 19.69 4,009 29.24 0.0011
2018-05-14 2018-03-31 13F NANOMETRICS COM 630077105 149,039 24,519 4,009
2019-04-23 2017-12-31 13F/A-1 NANOMETRICS COM 630077105 124,520 53,413 75.12 3,102 51.54 0.0008
2018-02-14 2017-12-31 13F NANOMETRICS COM 630077105 124,520 53,413 3,102
2017-11-14 2017-09-30 13F NANOMETRICS COM 630077105 71,107 -26,653 -27.26 2,047 -17.23 0.0006
2017-08-11 2017-06-30 13F NANOMETRICS COM 630077105 97,760 -60,413 -38.19 2,473 -48.67 0.0007
2017-05-22 2017-03-31 13F/A-1 NANOMETRICS COM 630077105 158,173 24,361 18.21 4,818 43.65 0.0015
2017-05-12 2017-03-31 13F NANOMETRICS COM 630077105 158,173 4,818
2017-02-22 2016-12-31 13F/A-1 NANOMETRICS COM 630077105 133,812 127,490 2,016.61 3,354 2,278.72 0.0011
2017-02-13 2016-12-31 13F NANOMETRICS COM 630077105 133,812 3,354
2016-11-10 2016-09-30 13F NANOMETRICS COM 630077105 6,322 -11,628 -64.78 141 -62.20 0.0000
2016-08-12 2016-06-30 13F NANOMETRICS COM 630077105 17,950 16,554 1,185.82 373 1,521.74 0.0001
2016-05-12 2016-03-31 13F NANOMETRICS COM 630077105 1,396 -1,319 -48.58 23 -45.24 0.0000
2016-02-09 2015-12-31 13F NANOMETRICS COM 630077105 2,715 2,010 285.11 42 425.00 0.0000
2016-02-08 2015-09-30 13F/A-1 NANOMETRICS COM 630077105 705 -4,333 -86.01 8 -90.24 0.0000
2015-11-09 2015-09-30 13F NANOMETRICS COM 630077105 705 8
2015-08-12 2015-06-30 13F NANOMETRICS COM 630077105 5,038 1,985 65.02 82 57.69 0.0000
2015-05-14 2015-03-31 13F NANOMETRICS COM 630077105 3,053 1,953 177.55 52 173.68 0.0000
2015-02-13 2014-12-31 13F NANOMETRICS COM 630077105 1,100 -2,884 -72.39 19 -68.85 0.0000
2014-12-16 2014-09-30 13F/A-1 NANOMETRICS COM 630077105 3,984 2,836 247.04 61 205.00 0.0000
2014-11-14 2014-09-30 13F NANOMETRICS COM 630077105 3,984 61
2014-05-13 2014-03-31 13F NANOMETRICS COM 630077105 1,148 81 7.59 20 0.00 0.0000
2014-02-13 2013-12-31 13F NANOMETRICS COM 630077105 1,067 1,067 20 0.0000
Legend
Shares
The total number of shares held by the institution at the end of the reporting period (the effective date). This is provided in the filing.
Value
The total value of the shares as of the effective date. This is provided in the filing.
Avg. Share Price
The weighted average share price of the shares held by the institution. We use FIFO accounting to determine this price
Class
This is the security class as indicated by the filer. There are a variety of values for this field. Common values include "EC" = equity common, "EP" - equity preferred
Allocation (%)
The percent of the institution's portfolio that this position represents. This is provided in NPORT filings. For 13F filings, we calculate it.
Change in Allocation
The change in allocation from the prior reporting period. This is calculated as current allocation - prior allocation.
Change in Allocation (%)
The percent change in allocation from the prior reporting period. This is calculated as (current allocation - prior allocation) / prior allocation.
Cost Basis
The total cost of the shares held. This is calculated as reported shares * avg. share price
Unrealized Gain/Loss
This is the market value of the position as of the effective date minus the cost basis.